The measurement method of micro-involute spur gear based on micro-vision

Aim at measuring basic parameters, geometric parameters and errors of tooth of micro-gears, a non-contact measurement method of micro-gear based on micro-vision is presented. In measurement, edge scanning and edge recognition based on process match principle were used to obtain accurate edge; the basic and geometric parameters could be measured by fitting the related edge data according with the definition of each parameter; the tooth profile errors were measured by building the measurement model in the direction of involute normal; and the tooth pitch errors were calculated by comparing between the nominal tooth pitch and each actual tooth pitch. The experimental results indicate that the essential micro-gear parameters are measured with high accuracy. And it also shows that this measurement method based on micro-vision can be applied to micro-spur gears successfully.