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The impact response characteristics research of the multilayer structure, cantilever-type electrothermal actuator based on MEMS

  • Nanjing University of Science and Technology
  • Beijing Institute of Technology

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

摘要

To study the impact response characteristics of multilayer structure, cantilever-type electrothermal actuators based on MEMS, a composite cantilever-beam model consisting of two layers of materials, SiO2 and Al, is built. By using the engineer mechanics theory, the von mise stress under the impacts in the fuze system can be obtained. Meanwhile, the Finite Element Method (FEM) simulation is made to get the deformation displacement of the fixed end and the von mises stress distribution of the model. Besides, the natural frequency response is studied. The results present the actuator's response characteristics of impacts in the fuze system.

源语言英语
主期刊名Material Science and MEMS Production
页87-92
页数6
DOI
出版状态已出版 - 2014
活动2014 Conference on MEMS and Nanotechnology, MEMS-NANO 2014 - Shenzhen, 中国
期限: 23 1月 2014 → 24 1月 2014

丛书

姓名Advanced Materials Research
卷901
ISSN(印刷版)1022-6680

会议

会议2014 Conference on MEMS and Nanotechnology, MEMS-NANO 2014
国家/地区中国
市Shenzhen
时期23/01/14 → 24/01/14

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