@inproceedings{10bff93d20b84c7492ec72e2f6fd4c87,
title = "The fabrication of 3D aspherical silicon microlenses using a shadow mask",
abstract = "This work explores a new technique for 3D aspherical Si microlens fabrication using a shadow mask. With the shadow mask, a convex aspherical SiO 2 layer is sputter deposited on a Si wafer due to the anisotropy of deposition. The shape of the SiO 2 is transferred to Si by DRIE to form the aspherical microlens. Microlenses with controllable apertures (0.4μmm - 2mm in diameter) and focal lengths (1mm - 12mm) can be fabricated using this simple, mass-production compatible and cost-effective method. The optical simulation verified the focal effect of the lens, which can be applied to infrared optics. Furthermore, a self-focusing acoustic transducer is fabricated using the Si microlens as a mold, providing potential good self-focusing effect for actuations and sensing.",
keywords = "Acoustic transducer, Infrared optics, Microlens, Shadow mask",
author = "J. Zhu and Chen, \{S. J.\} and Lin, \{C. Y.\} and J. Oiler and H. Wang and Chen, \{Y. C.\} and H. Yu",
year = "2011",
doi = "10.1109/TRANSDUCERS.2011.5969562",
language = "English",
isbn = "9781457701573",
series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
pages = "2370--2373",
booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",
}