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Surface shape detection of asymmetric double-sided off-axis aspheric lens based on Spatial Light Modulator

  • Lai Xiaoxiao
  • , Li Yiting
  • , Li Dongmei
  • , Cao Jiajing
  • , Wang Wenxi
  • , Chang Jun*
  • *此作品的通讯作者
  • Beijing Institute of Technology
  • CAS - Institute of Semiconductors

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

With the improvement of optical lens manufacturing and processing capabilities, the surface shape of optical components is becoming more and more complex, such as asymmetric double-sided off-axis aspheric lenses. Generally, people use two different surface detection equipment to detect this type of optical surface, which is inefficient and not universal. Thus in this paper, we present a dull Compensation method based on Spatial Light Modulator. In this method, we detected an asymmetric double-sided off-axis aspheric mirror with convex and concave surfaces with just one detection equipment. For the concave surface, the residual wave aberration is 0.0002? (Peak to Valley), for the convex surface, the residual wave aberration is 0.0097? (Peak to Valley). The result shows that this method is feasible in testing asymmetric double-sided off-axis aspheric lenses.

源语言英语
主期刊名Eighth Symposium on Novel Photoelectronic Detection Technology and Applications
编辑Junhong Su, Lianghui Chen, Junhao Chu, Shining Zhu, Qifeng Yu
出版商SPIE
ISBN(电子版)9781510653115
DOI
出版状态已出版 - 2022
活动8th Symposium on Novel Photoelectronic Detection Technology and Applications - Kunming, 中国
期限: 7 12月 20219 12月 2021

丛书

姓名Proceedings of SPIE - The International Society for Optical Engineering
12169
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议8th Symposium on Novel Photoelectronic Detection Technology and Applications
国家/地区中国
Kunming
时期7/12/219/12/21

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