@inproceedings{fa2795e7abed49dea51c02a8d5a0c6c1,
title = "Study on the impact of high reflectance designs for mid-infrared MEMS Fabry-Perot interferometers",
abstract = "The influence of 'high contrast' HR coating composed by Ge and SiO QWOT layers stack and 'low contrast' HR coating composed by Ge and ZnS quasi-QWOT layers stack are designed and applied to tunable FPI simulation. The peak reflectance at the reference wavelength were designed to 95.8\%. The reflectance and phase shift on reflection of 'high contrast' HR coating and 'low contrast' HR coating are simulated. The designed coatings are applied to tunable FPI simulation. The free spectral range and center wavelength tuning rate are compared and discussed.",
keywords = "FPI, high reflectance coating, mid-infrared, phase shift on reflection",
author = "Shaoyu Zhao and Fan Wang and Zhaochuan Wu and Sen Zhang and Wenkai Li and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2025 SPIE.; 10th Symposium on Novel Optoelectronic Detection Technology and Applications ; Conference date: 01-11-2024 Through 03-11-2024",
year = "2025",
doi = "10.1117/12.3057542",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Chen Ping",
booktitle = "Tenth Symposium on Novel Optoelectronic Detection Technology and Applications",
address = "United States",
}