Study on non-phase-shifting phase retrieval methods for interferogram with large phase gradient

Yao Hu, Xueyin Sun, Shaopu Wang, Mingzhe Ye, Qun Hao*

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

1 引用 (Scopus)

摘要

As a non-contact, high-precision optical component testing method, interferometry performs the measurement by solving the interferogram containing the phase information of the object to be measured. The non-mechanical-phase-shifting phase retrieval method based on single or two interferograms has the advantages of good vibration resistance, fast speed and simple system, which can meet the increasingly urgent online and on-site detection requirements. Aiming at the large gradient phase detection requirements in processing, this paper compares the accuracy of typical non-mechanical-phaseshifting interferometric phase retrieval methods, including carrier Fourier method, digital moiré interferometry (DMI), and two DMI-based methods, namely two-step carrier stitching method and DMI combined with Newton iterative algorithm proposed by the authors. In this paper, the influences of the magnitude of the phase gradient and the noise of the interferogram on the phase retrieval accuracy of the above methods are analyzed. The simulation results in this paper will provide a theoretical basis for the selection of algorithms for in situ interferometry.

源语言英语
主期刊名2019 International Conference on Optical Instruments and Technology
主期刊副标题Optoelectronic Measurement Technology and Systems
编辑Jigui Zhu, Kexin Xu, Hai Xiao, Sen Han
出版商SPIE
ISBN(电子版)9781510636569
DOI
出版状态已出版 - 2020
活动2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems - Beijing, 中国
期限: 26 10月 201928 10月 2019

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
11439
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
国家/地区中国
Beijing
时期26/10/1928/10/19

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