@inproceedings{d741538117c541d8b4ce61971a5e4928,
title = "Study of Film Discoloration and Moisture Influence in Plasam-Enhanced Sub-Atomsphericic Deposition for CSTIC 2026",
abstract = "This study investigates the discoloration phenomenon in plasma-enhanced sub-atmospheric fill (PE-SAF) films, which manifests as visible defects accompanied by reduced film thickness (as measured by focused ion beam scanning electron microscopy, FIB-SEM), significant stoichiometric deviation (characterized via scanning electron microscopy with energy-dispersive X-ray spectroscopy, SEM-EDS), and elevated surface charge (detected by digital surface photovoltage, DSPV). A comprehensive approach combining multiphase simulation and controlled experimentations was employed to elucidate the underlying mechanism. The results indicate that increasing the equipment front-end module (EFEM) pressure differential relative to the external environment from 2.5 - 3 Pa to 7.5 - 8 Pa markedly reduces the incidence of film discoloration, with complete suppression achieved in small-batch tests. This optimization ultimately contributed to a 4\% improvement in wafer yield during high-volume production, demonstrating significant practical implications for enhancing quality control in semiconductor manufacturing.",
keywords = "discoloration, EFEM, SACVD",
author = "Hui Li and Miao He and Lei Wang and Yeliang Wang and Guangquan Lv",
note = "Publisher Copyright: {\textcopyright} 2026 IEEE.; 2026 Conference of Science and Technology of Integrated Circuits, CSTIC 2026 ; Conference date: 22-03-2026 Through 24-03-2026",
year = "2026",
doi = "10.1109/CSTIC68613.2026.11537670",
language = "English",
series = "2026 Conference of Science and Technology of Integrated Circuits, CSTIC 2026",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
editor = "Cor Claeys and Bin Yu and Beichao Zhang and Peng Bai and Qianqian Huang and Xiaowei Li and Liang, \{Steve X.\} and Hsiang-Lan Lung and Linyong Pang and Xinping Qu and Xiaoping Shi and Jianshi Tang and Pingqiang Zhou and Cheng Zhuo",
booktitle = "2026 Conference of Science and Technology of Integrated Circuits, CSTIC 2026",
address = "United States",
}