跳到主要导航 跳到搜索 跳到主要内容

Striations in helicon-type argon plasma

  • Beijing Institute of Technology

科研成果: 期刊稿件文章同行评审

摘要

In this paper, two types of stationary striations appearing in an argon helicon plasma source are presented. The formation and features of the striations were investigated experimentally under different conditions, including RF power, gas pressure, and external magnetic field. The results show that the striation spacing decreases as the gas pressure increases but does not change significantly along with the magnetic field and the RF power. It is suggested that these striations are strongly related to the non-local effect of electron kinetics in the plasma channel with a weak electric field. The different pressures in downstream and antenna regions will lead to different types of striations in an argon helicon plasma source.

源语言英语
文章编号113502
期刊Physics of Plasmas
28
11
DOI
出版状态已出版 - 1 11月 2021

指纹

探究 'Striations in helicon-type argon plasma' 的科研主题。它们共同构成独一无二的指纹。

引用此