Single-step spatial rotation error separation technique for the ultraprecision measurement of surface profiles

To improve the measurement accuracy of the profilometer for large optical surfaces, a new single-step spatial rotation error separation technique (SSEST) is proposed to separate the surface profile error and spindle spatial rotation error, and a novel SSEST-based system for surface profile measurement is developed. In the process of separation, two sets of measured results at the ith measurement circle are obtained before and after the rotation of error separation table, the surface profile error and spatial rotation error of spindle can be determined using discrete Fourier-transform and harmonic analysis. Theoretical analyses and experimental results indicate that SSEST can accurately separate spatial rotation error of spindle from the measured surface profile results within the range of 1-100 upr and improve the accuracy of surface profile measurements.