Simulation and experimental study on the molding process for microgrooveson optical glass

In order to manufacture high precision optical glass microgrooves, the finite element simulation and experiment on glass molding processare carried out to reveal the glass deformation behaviorat high temperature during microgroove molding. Firstly, a modified glass-mold interface friction model is established by combining the general adhesive friction model with the Wanheim/Bay friction model, and the modified model is applied to the finite element calculation. Secondly, the high temperature viscoelastic constitutive model of glass is established, the glass microgroove molding process is simulated, and the influence of the improved glass-mold interface friction model on the forming stress is analyzed. Finally, the microgrooves are fabricated by using Ni-P plating mold. The results present that a distinct interface slip phenomenon appeared when the modified glass-mold interface friction model is applied in simulation.The element stress curve shows jitter rising trend after reaching the shear threshold value.Compared with the Coulomb friction model, the modified model can describe the interface friction characteristics of high temperature glass more accurately. The height direction replication error of glass microgrooves formed by molding process is 0.275 μm.