Research on verification and analysis of micro-gyroscope measuring system based on dynamic response

Micro-gyroscope is a typical representative of MEMS development, and relative measuring and testing may acquire some important performance parameters, which facilitate analysis and mastery of the operating characteristics further. However, accuracy and reliability of the results or data from measuring system become the key problem for almost all measuring systems. Based on results produced by micro vision measuring, principles about driving and operating of micro-gyroscope are analyzed, and the theory function between input excitation and vibration response is established. With further study on the whole process of dynamic response analysis, resonant amplitude and frequency are finally defined as two decisive factors influencing the accuracy of micro-gyroscope measuring system. Focusing on experiment design and calculation analysis of the two parameters, accuracy and reliability of the system are well verified, which presents important references for other relative measuring systems of micro-gyroscope.