Research on linear accuracy evaluation method of a micro-manipulation platform

The parallel micromotion platform is widely used in high-precision applications. Considering that some accuracy analysis methods of traditional parallel mechanisms, which can not quantificationally reflect the accuracy of micro-motion platforms overall, are still used in micro-motion area, it is necessary to discuss the issue in detail. To specify it, taking a 6-DOF micro-motion platform for instance, the Jacobi matrix of the input and output poses was obtained by the validated differential method. The concept of accuracy coefficient was proposed, by which the pose accuracy of the platform in its workspace can be estimated. The error simulation example indicates that the accuracy analysis method is doable.