Research on Flexible Integration Methods for MEMS Safety and Arming Device

The integration of micro-miniature fuze safety and arming devices and pyrotechnic devices using conventional MEMS processes presents significant challenges due to limitations imposed by temperature constraints and inherent response characteristics. This study proposes a novel approach to the room-temperature, heterogeneous integration of these devices. The method uses polymer materials, such as flexible bonding adhesives and PDMS (polydimethylsiloxane), to integrate silicon-based safety and arming devices with the acceleration chamber and metallic flyer layer within the micro-explosion sequence. We systematically analyze the viscoelastic properties and stress intensity variation mechanisms of these flexible materials and optimize the curing agent ratio to construct a stress-buffering structure. Mechanical performance tests and characterization confirm that the flexible bonding adhesive achieves a maximum integration strength of 143 – 161 megapascals (MPa), while the polydimethylsiloxane (PDMS)-based flexible integration exhibits a bonding strength of 150–160 MPa, representing a maximum strength enhancement of 41.3%. This method is highly applicable to the heterogeneous integration of multiple components in MEMS fuze.