Research on Dust Concentration Measurement Technique Based on the Theory of Ultrasonic Attenuation

In this paper, a method of characteristics dust concentration is proposed, which based on ultrasonic changes of MEMS piezoelectric ultrasonic transducer. The principle is that the intensity of the ultrasonic will produce attenuation with the propagation medium and propagation distance, the attenuation coefficient is affect by dust concentration. By detecting the changes of ultra acoustic in the dust, the concentration of the dust is calculate by the attenuation-concentration model, and the EACH theory model is based on this principle. The experimental results show that the MEMS piezoelectric ultrasonic transducer can be use for dust concentration of 100-900 g/m³ detection, the deviation between theory and experiments is smaller than 10.4%.