TY - GEN
T1 - Research on 3D fabrication technology of monocrystalline silicon microlens array femtosecond laser
AU - Zhou, Tianfeng
AU - Wu, Hui
AU - Liu, Peng
AU - Li, Linkang
AU - Xie, Qiuchen
N1 - Publisher Copyright:
© 2024 SPIE.
PY - 2024
Y1 - 2024
N2 - When the traditional processing method is used to process hard and brittle monocrystalline silicon, it will encounter a variety of problems, so it is necessary to use laser processing method. Laser processing is a new processing method, and there are few relevant studies on laser processing silicon convex microlens array, and no polishing. Therefore, the morphologies of silicon microlens arrays fabricated by femtosecond laser are studied in this paper. The results show that when the fixed green light is 100KHz, the power is about 36W, and the speed is 1500mm/s, the 3D dynamic processing effect of femtosecond laser is better. The morphology compensation research is carried out, and the surface roughness is greatly improved by using mirror jet polishing.
AB - When the traditional processing method is used to process hard and brittle monocrystalline silicon, it will encounter a variety of problems, so it is necessary to use laser processing method. Laser processing is a new processing method, and there are few relevant studies on laser processing silicon convex microlens array, and no polishing. Therefore, the morphologies of silicon microlens arrays fabricated by femtosecond laser are studied in this paper. The results show that when the fixed green light is 100KHz, the power is about 36W, and the speed is 1500mm/s, the 3D dynamic processing effect of femtosecond laser is better. The morphology compensation research is carried out, and the surface roughness is greatly improved by using mirror jet polishing.
KW - Femtosecond laser processing
KW - hard and brittle material
KW - mirror jet polishing
KW - three-dimensional machining
UR - https://www.scopus.com/pages/publications/85203106873
U2 - 10.1117/12.3040132
DO - 10.1117/12.3040132
M3 - Conference contribution
AN - SCOPUS:85203106873
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - 4th International Conference on Laser, Optics, and Optoelectronic Technology, LOPET 2024
A2 - Dang, Suihu
A2 - Costa, Manuel Filipe
PB - SPIE
T2 - 4th International Conference on Laser, Optics, and Optoelectronic Technology, LOPET 2024
Y2 - 17 May 2024 through 19 May 2024
ER -