Research of novel Li-Al-Ti-P-O electrolyte prepared by magnetron sputtering for thin-film lithium battery

Li-Al-Ti-P-O thin-film electrolyte was prepared by magnetron sputtering, which was not reported in literature. The structure, morphology, composition and electrochemical performances of the thin-film electrolyte were characterized by X-ray diffraction (XRD), scanning electron microscope (SEM), energy dispersive X-ray spectroscopy (EDX), ac impedance spectroscopy and cyclic voltammetry (CV), respectively. XRD and SEM analysis showed that the thin films possessed the amorphous structure, and were dense and uniform. The ionic conductivity of the thin-film electrolyte was 10^-6 S/cm at 25°C, and the electrochemical window of it was about 3.5 V. This kind of electrolyte with good physical chemistry properties is a candidate material for solid state thin-film lithium batteries.