Rapid Detection of Deformable Mirrors Based on Phase Measuring Deflectometry

Deformable mirrors play a critical role in adaptive optics systems, and as the precision demands of optical systems continue to rise, the accurate detection of deformable mirror shape and performance becomes essential to the overall system's effectiveness. Improved detection methods can significantly enhance the design quality and manufacturing precision of deformable mirrors. In this paper, we introduce a phase measuring deflectmetry that directly measures slope variations to detect the surface deformation of deformable mirrors. To further enhance measurement accuracy, monitoring stations are integrated into the system. We conducted measurements on a 100mm-diameter deformable mirror, and through comparisons of simulation and experimental results, we verified that the system provides high measurement accuracy and real-time monitoring of dynamic error influences. This system is well-suited for long-term monitoring of surface changes in deformable mirrors.