@inproceedings{7a51e35d01334dc698cef5039d8abb81,
title = "Phase-only pupil filtering confocal measurement system with higher lateral resolution",
abstract = "Phase-only pupil filtering confocal microscopy (PFCM), a new approach is proposed to achieve a higher lateral resolution required for ultraprecision measurement of microstructural workpieces, which uses a three-zone phase-only pupil filter with lateral superresolution capability obtained through optimized design to change the confocal microscopy system's (CMS) distribution of three-dimensional point spread function, so that the CMS lateral resolution is therefore significantly improved while its axial resolution is slightly improved. Preliminary experimental comparison and analyses indicate that, the lateral and axial resolutions of PFCM are better than 0.2μm and 2nm, respectively, when λ= 632.8 nm, NA=0.85 and lateral spot size with a three-zone phase-only pupil filter GT=0.65.",
keywords = "Confocal microscopy system, Pupil filter, Superresolution",
author = "Lirong Qiu and Zhengde Feng and Dingguo Sha",
year = "2006",
doi = "10.1117/12.717275",
language = "English",
isbn = "081946452X",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Sixth International Symposium on Instrumentation and Control Technology",
note = "Sitxh International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence ; Conference date: 13-10-2006 Through 15-10-2006",
}