Optical measurement and analysis of dynamic characteristics of micro-comb structure

Optical test method, a non-contact measurement, has become a research hotspot in the MEMS dynamic testing field. In order to real-time detect the resonance parameters of driving model, the micro-vision optical test system and related video analysis software are used to measure the dynamic characteristics of micro-comb structure. Using this micro-vision optical test system and software, we can obtain the displacement response curve and amplitude-frequency characteristic curve under driving model. Correspondingly, some parameters of driving model such as natural frequency, quality factor and damping coefficient can be further obtained. And the experimental results are in good agreement with those calculated.