Novel self‑compensation method to lower the temperature drift of a quartz MEMS gyroscope

Lihui Feng; Wenjun Gu; Ke Zhao; Yu Nan Sun; Fang Cui; Jianmin Cui; Aiying Yang

doi:10.1007/s00542-014-2113-z

Novel self‑compensation method to lower the temperature drift of a quartz MEMS gyroscope

Lihui Feng^*
, Wenjun Gu
, Ke Zhao
, Yu Nan Sun
, Fang Cui
, Jianmin Cui
, Aiying Yang

^*此作品的通讯作者

Beijing Institute of Technology
Pennsylvania State University

科研成果: 期刊稿件 › 文章 › 同行评审

6 引用（Scopus）

摘要

A new self-compensation method is proposed in this paper. The impedance of a quartz tuning fork changes along with the temperature. A digital driving circuit is designed so that the frequency can be adjusted by controlling the phase. The relationship between the driving amplitude and the temperature is captured in a digital circuit, which can reflect the temperature information. As the relationship is nonlinear, after third-order fitting, the temperature has a precision of 2.356 °C. Finally, the bias stability is optimized and the drift decreases to 1.7 %.

源语言	英语
页（从-至）	2231-2237
页数	7
期刊	Microsystem Technologies
卷	20
期	12
DOI	https://doi.org/10.1007/s00542-014-2113-z
出版状态	已出版 - 22 2月 2014
已对外发布	是

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title = "Novel self‑compensation method to lower the temperature drift of a quartz MEMS gyroscope",

abstract = "A new self-compensation method is proposed in this paper. The impedance of a quartz tuning fork changes along with the temperature. A digital driving circuit is designed so that the frequency can be adjusted by controlling the phase. The relationship between the driving amplitude and the temperature is captured in a digital circuit, which can reflect the temperature information. As the relationship is nonlinear, after third-order fitting, the temperature has a precision of 2.356 °C. Finally, the bias stability is optimized and the drift decreases to 1.7 \%.",

author = "Lihui Feng and Wenjun Gu and Ke Zhao and Sun, \{Yu Nan\} and Fang Cui and Jianmin Cui and Aiying Yang",

note = "Publisher Copyright: {\textcopyright} Springer-Verlag Berlin Heidelberg 2014.",

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TY - JOUR

T1 - Novel self‑compensation method to lower the temperature drift of a quartz MEMS gyroscope

AU - Feng, Lihui

AU - Gu, Wenjun

AU - Zhao, Ke

AU - Sun, Yu Nan

AU - Cui, Fang

AU - Cui, Jianmin

AU - Yang, Aiying

PY - 2014/2/22

Y1 - 2014/2/22

N2 - A new self-compensation method is proposed in this paper. The impedance of a quartz tuning fork changes along with the temperature. A digital driving circuit is designed so that the frequency can be adjusted by controlling the phase. The relationship between the driving amplitude and the temperature is captured in a digital circuit, which can reflect the temperature information. As the relationship is nonlinear, after third-order fitting, the temperature has a precision of 2.356 °C. Finally, the bias stability is optimized and the drift decreases to 1.7 %.

AB - A new self-compensation method is proposed in this paper. The impedance of a quartz tuning fork changes along with the temperature. A digital driving circuit is designed so that the frequency can be adjusted by controlling the phase. The relationship between the driving amplitude and the temperature is captured in a digital circuit, which can reflect the temperature information. As the relationship is nonlinear, after third-order fitting, the temperature has a precision of 2.356 °C. Finally, the bias stability is optimized and the drift decreases to 1.7 %.

UR - https://www.scopus.com/pages/publications/85027951334

U2 - 10.1007/s00542-014-2113-z

DO - 10.1007/s00542-014-2113-z

M3 - Article

AN - SCOPUS:85027951334

SN - 0946-7076

VL - 20

SP - 2231

EP - 2237

JO - Microsystem Technologies

JF - Microsystem Technologies

IS - 12

ER -

Novel self‑compensation method to lower the temperature drift of a quartz MEMS gyroscope

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