Nonlinear error analysis and experimental measurement of Birefringence-Zeeman dual-frequency laser interferometer

Yuan Yang; Yong Deng; Yidong Tan; Zhenyu Huang; Yong Zhang; Yun Wang; Shulian Zhang

doi:10.1016/j.optcom.2018.12.030

Nonlinear error analysis and experimental measurement of Birefringence-Zeeman dual-frequency laser interferometer

Yuan Yang
, Yong Deng
, Yidong Tan
, Zhenyu Huang
, Yong Zhang
, Yun Wang
, Shulian Zhang^*

^*此作品的通讯作者

Nantong University
Tsinghua University
Guangdong Key Laboratory of Modern Geometry and Mechanics Measurement Technology
Beijing Institute of Space Electromechanical

科研成果: 期刊稿件 › 文章 › 同行评审

24 引用（Scopus）

摘要

After a long-term research, the birefringence-Zeeman dual-frequency (BZDF) laser has entered the practical stage, and the BZDF laser interferometer has more powerful displacement and size measurement functions, especially the near-zero nonlinearity. This paper theoretically analyzes the mechanism of the near-zero nonlinear error, including theoretical simulation and experimental measurements. The measurement results show that the nonlinear error of the BZDF laser interferometer is only 0.3 nm, which is one order of magnitude smaller than that of traditional Zeeman dual-frequency (ZDF) laser interferometer. It has broad application prospects in the field of ultra-precision metrology.

源语言	英语
页（从-至）	264-268
页数	5
期刊	Optics Communications
卷	436
DOI	https://doi.org/10.1016/j.optcom.2018.12.030
出版状态	已出版 - 1 4月 2019
已对外发布	是

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@article{07367558e71c4d3d8f77da9be11e0b68,

title = "Nonlinear error analysis and experimental measurement of Birefringence-Zeeman dual-frequency laser interferometer",

abstract = "After a long-term research, the birefringence-Zeeman dual-frequency (BZDF) laser has entered the practical stage, and the BZDF laser interferometer has more powerful displacement and size measurement functions, especially the near-zero nonlinearity. This paper theoretically analyzes the mechanism of the near-zero nonlinear error, including theoretical simulation and experimental measurements. The measurement results show that the nonlinear error of the BZDF laser interferometer is only 0.3 nm, which is one order of magnitude smaller than that of traditional Zeeman dual-frequency (ZDF) laser interferometer. It has broad application prospects in the field of ultra-precision metrology.",

keywords = "Birefringence-Zeeman dual-frequency laser, Dual-frequency laser interferometer, Frequency aliasing, Nonlinear error",

author = "Yuan Yang and Yong Deng and Yidong Tan and Zhenyu Huang and Yong Zhang and Yun Wang and Shulian Zhang",

note = "Publisher Copyright: {\textcopyright} 2018 Elsevier B.V.",

year = "2019",

month = apr,

day = "1",

doi = "10.1016/j.optcom.2018.12.030",

language = "English",

volume = "436",

pages = "264--268",

journal = "Optics Communications",

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publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Nonlinear error analysis and experimental measurement of Birefringence-Zeeman dual-frequency laser interferometer

AU - Yang, Yuan

AU - Deng, Yong

AU - Tan, Yidong

AU - Huang, Zhenyu

AU - Zhang, Yong

AU - Wang, Yun

AU - Zhang, Shulian

PY - 2019/4/1

Y1 - 2019/4/1

N2 - After a long-term research, the birefringence-Zeeman dual-frequency (BZDF) laser has entered the practical stage, and the BZDF laser interferometer has more powerful displacement and size measurement functions, especially the near-zero nonlinearity. This paper theoretically analyzes the mechanism of the near-zero nonlinear error, including theoretical simulation and experimental measurements. The measurement results show that the nonlinear error of the BZDF laser interferometer is only 0.3 nm, which is one order of magnitude smaller than that of traditional Zeeman dual-frequency (ZDF) laser interferometer. It has broad application prospects in the field of ultra-precision metrology.

AB - After a long-term research, the birefringence-Zeeman dual-frequency (BZDF) laser has entered the practical stage, and the BZDF laser interferometer has more powerful displacement and size measurement functions, especially the near-zero nonlinearity. This paper theoretically analyzes the mechanism of the near-zero nonlinear error, including theoretical simulation and experimental measurements. The measurement results show that the nonlinear error of the BZDF laser interferometer is only 0.3 nm, which is one order of magnitude smaller than that of traditional Zeeman dual-frequency (ZDF) laser interferometer. It has broad application prospects in the field of ultra-precision metrology.

KW - Birefringence-Zeeman dual-frequency laser

KW - Dual-frequency laser interferometer

KW - Frequency aliasing

KW - Nonlinear error

UR - https://www.scopus.com/pages/publications/85058668235

U2 - 10.1016/j.optcom.2018.12.030

DO - 10.1016/j.optcom.2018.12.030

M3 - Article

AN - SCOPUS:85058668235

SN - 0030-4018

VL - 436

SP - 264

EP - 268

JO - Optics Communications

JF - Optics Communications

ER -

Nonlinear error analysis and experimental measurement of Birefringence-Zeeman dual-frequency laser interferometer

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