TY - GEN
T1 - NEMS Sensors Based on Suspended Graphene
AU - Fan, Xuge
AU - Niklaus, Frank
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/4/25
Y1 - 2021/4/25
N2 - Graphene has exciting potential in nanoelectromechanical system (NEMS) applications due to its unique mechanical and electrical properties as well as its ultimate thinness. In this paper, we discuss the potential of using suspended graphene structures in NEMS sensors and provide an overview of our previous research results on piezoresistive graphene NEMS sensors, including pressure sensors and accelerometers.
AB - Graphene has exciting potential in nanoelectromechanical system (NEMS) applications due to its unique mechanical and electrical properties as well as its ultimate thinness. In this paper, we discuss the potential of using suspended graphene structures in NEMS sensors and provide an overview of our previous research results on piezoresistive graphene NEMS sensors, including pressure sensors and accelerometers.
UR - https://www.scopus.com/pages/publications/85113337673
U2 - 10.1109/NEMS51815.2021.9451351
DO - 10.1109/NEMS51815.2021.9451351
M3 - Conference contribution
AN - SCOPUS:85113337673
T3 - Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021
SP - 1169
EP - 1172
BT - Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021
Y2 - 25 April 2021 through 29 April 2021
ER -