@inproceedings{9412c6da44d9432993b484279381367e,
title = "Multi-axis electrothermal scanning micromirror with low driving voltage",
abstract = "This paper presents the design, fabrication and measurement results of a multi-axis electrothermal micromirror. This micromirror employs unique bimorph actuators to achieve one-dimensional piston motion and two-dimensional rotation.",
author = "Kemiao Jia and Huikai Xie",
year = "2007",
language = "English",
isbn = "1557528349",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America",
booktitle = "Conference on Lasers and Electro-Optics, CLEO 2007",
note = "Conference on Lasers and Electro-Optics, CLEO 2007 ; Conference date: 06-05-2007 Through 06-05-2007",
}