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Molecular Dynamics Simulation of the Mechanical Properties of Ag-Cu Supersaturated Solid Solution for High-Density Interconnect Application

  • Sichen Liu
  • , Xiaochen Xie*
  • , Jian Zhang
  • , Shiang Gao
  • , Yuan Zhang
  • , Shuquan Chen
  • , Xiuchen Zhao
  • , Gang Zhang
  • , Yongjun Huo*
  • *此作品的通讯作者
  • Beijing Institute of Technology
  • Beijing Microelectronics Technology Institute
  • Shenzhen MSU-BIT University

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

With the rapid advancement of the integrated circuit industry, electronic packaging technologies have played a pivotal role in shaping the modern information society. The relentless drive for lower costs, miniaturization, and high-level integration has spurred the emergence of three-dimensional (3D) integration, significantly enhancing overall circuit performance. However, conventional interconnection methods employing copper pillars and tin-based solder frequently led to the formation of brittle intermetallic compounds (IMCs) at the solder/substrate interface during reflow soldering, thereby posing serious reliability challenges.To address these challenges, solid-state bonding technologies have emerged as a promising alternative. Our research group recently developed a novel Ag-Cu supersaturated solid solution via magnetron sputtering, which shows great potential as a micro-bump bonding material. To evaluate its suitability for 3D integration, we employed molecular dynamics simulations to construct two models of the Ag-Cu supersaturated solid solution: a single-crystal tensile model and a diffusion bonding model. These were used to explore the mechanical behavior and interfacial diffusion characteristics of the supersaturated alloy. The results demonstrate that the Ag-Cu supersaturated solid solution exhibits excellent performance as a micro-bump material during the bonding process. The enhanced bonding behavior is primarily attributed to the lattice destabilization and elevated chemical potential induced by Cu supersaturation. These findings offer atomistic-level insights for the design of metastable alloys to achieve reliable solid-state interconnection in advanced electronic packaging.

源语言英语
主期刊名2025 26th International Conference on Electronic Packaging Technology, ICEPT 2025
出版商Institute of Electrical and Electronics Engineers Inc.
版本2025
ISBN(电子版)9781665465809
DOI
出版状态已出版 - 2025
活动26th International Conference on Electronic Packaging Technology, ICEPT 2025 - Shanghai, 中国
期限: 5 8月 20257 8月 2025

会议

会议26th International Conference on Electronic Packaging Technology, ICEPT 2025
国家/地区中国
Shanghai
时期5/08/257/08/25

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