@inproceedings{dab159bb8832496f95704ff04ce8558a,
title = "Mid-infrared tunable MEMS Fabry-Perot interferometer operated at the first interference order",
abstract = "Results of tunable MEMS FPI operated in first interference order for the range of mid-infrared were presented. The HR coating is designed as two stacks of SiO / Ge QWOT Bragg reflectors. The AR was designed carefully to eliminate the stress mismatch induced by AR and HR coatings. The center wavelength tune from 4948 nm to 3612 nm actuated by 36.5 V control voltage. The FWHM of all spectra vary between 42 nm to 82 nm. The peak transmittances are large than 60\% for all measured spectra.",
keywords = "FPI, high reflectance coating, mid-infrared, phase shift on reflection",
author = "Shaoyu Zhao and Sen Zhang and Wenkai Li and Zhaochuan Wu and Fan Wang and Bin Long and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2025 SPIE.; 2024 Advanced Fiber Laser Conference, AFL 2024 ; Conference date: 08-11-2024 Through 10-11-2024",
year = "2025",
doi = "10.1117/12.3058907",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Guoqing Chang and Yan Feng",
booktitle = "Advanced Fiber Laser Conference, AFL 2024",
address = "United States",
}