Micro/nano grating and its application to moiré measurement

Huimin Xie; Zhanwei Liu; Haixia Shang; Qikun Xue; Jinfeng Jia; Daining Fang

doi:10.1117/12.621896

Micro/nano grating and its application to moiré measurement

Huimin Xie^*
, Zhanwei Liu
, Haixia Shang
, Qikun Xue
, Jinfeng Jia
, Daining Fang

^*此作品的通讯作者

Tsinghua University
CAS - Institute of Physics

科研成果: 期刊稿件 › 会议文章 › 同行评审

摘要

In this paper, some novel micro/nano- moiré grating fabricating techniques are introduced. The gratings are produced by the SPM lithography, FIB lithography, and molecular beam epitaxy (MBE) method. The moiré patterns formed with these gratings are also introduced. The gratings are successfully to be used to measure the residual deformation in the surface around a step edge of the Al/Si artificial nanocluster with the moiré methods. The successful experimental results verify the feasibility of these methods.

源语言	英语
期刊论文编号	118
页（从-至）	740-744
页数	5
期刊	Proceedings of SPIE - The International Society for Optical Engineering
卷	5852 PART II
DOI	https://doi.org/10.1117/12.621896
出版状态	已出版 - 2005
已对外发布	是
活动	Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics - Singapore, 新加坡期限: 29 11月 2004 → 1 12月 2004

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@article{64ba855ce8a2434591695aaf5405d4c7,

title = "Micro/nano grating and its application to moir{\'e} measurement",

abstract = "In this paper, some novel micro/nano- moir{\'e} grating fabricating techniques are introduced. The gratings are produced by the SPM lithography, FIB lithography, and molecular beam epitaxy (MBE) method. The moir{\'e} patterns formed with these gratings are also introduced. The gratings are successfully to be used to measure the residual deformation in the surface around a step edge of the Al/Si artificial nanocluster with the moir{\'e} methods. The successful experimental results verify the feasibility of these methods.",

keywords = "FEB lithography, Nano- moir{\'e}, Nano-grating, SPM lithography",

author = "Huimin Xie and Zhanwei Liu and Haixia Shang and Qikun Xue and Jinfeng Jia and Daining Fang",

year = "2005",

doi = "10.1117/12.621896",

language = "English",

volume = "5852 PART II",

pages = "740--744",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics ; Conference date: 29-11-2004 Through 01-12-2004",

}

TY - JOUR

T1 - Micro/nano grating and its application to moiré measurement

AU - Xie, Huimin

AU - Liu, Zhanwei

AU - Shang, Haixia

AU - Xue, Qikun

AU - Jia, Jinfeng

AU - Fang, Daining

PY - 2005

Y1 - 2005

N2 - In this paper, some novel micro/nano- moiré grating fabricating techniques are introduced. The gratings are produced by the SPM lithography, FIB lithography, and molecular beam epitaxy (MBE) method. The moiré patterns formed with these gratings are also introduced. The gratings are successfully to be used to measure the residual deformation in the surface around a step edge of the Al/Si artificial nanocluster with the moiré methods. The successful experimental results verify the feasibility of these methods.

AB - In this paper, some novel micro/nano- moiré grating fabricating techniques are introduced. The gratings are produced by the SPM lithography, FIB lithography, and molecular beam epitaxy (MBE) method. The moiré patterns formed with these gratings are also introduced. The gratings are successfully to be used to measure the residual deformation in the surface around a step edge of the Al/Si artificial nanocluster with the moiré methods. The successful experimental results verify the feasibility of these methods.

KW - FEB lithography

KW - Nano- moiré

KW - Nano-grating

KW - SPM lithography

UR - https://www.scopus.com/pages/publications/28444449509

U2 - 10.1117/12.621896

DO - 10.1117/12.621896

M3 - Conference article

AN - SCOPUS:28444449509

SN - 0277-786X

VL - 5852 PART II

SP - 740

EP - 744

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 118

T2 - Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics

Y2 - 29 November 2004 through 1 December 2004

ER -

Micro/nano grating and its application to moiré measurement

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