MEMS millimeter-wave filter design based on 3-D finite element method

Huai Zhi Yang; Hou Jun Sun; Wei Hua Yu; Xin Lu

MEMS millimeter-wave filter design based on 3-D finite element method

Huai Zhi Yang^*
, Hou Jun Sun
, Wei Hua Yu
, Xin Lu

^*此作品的通讯作者

集成电路与电子学院

Beijing Institute of Technology

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

A novel design method was presented for millimeter-wave micro-electro-mechanical-systems (MEMS) filters based on FEM, which have the same results as the traditional FDTD method. Moreover, an MEMS filter's design and simple machining flow were studied, and some significantly academic analyzing and engineering application were obtained. The research of this design method is helpful and useful to the design of other millimeter-wave passive devices.

源语言	英语
页（从-至）	37-42
页数	6
期刊	Binggong Xuebao/Acta Armamentarii
卷	29
期	1
出版状态	已出版 - 1月 2008

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引用此

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title = "MEMS millimeter-wave filter design based on 3-D finite element method",

abstract = "A novel design method was presented for millimeter-wave micro-electro-mechanical-systems (MEMS) filters based on FEM, which have the same results as the traditional FDTD method. Moreover, an MEMS filter's design and simple machining flow were studied, and some significantly academic analyzing and engineering application were obtained. The research of this design method is helpful and useful to the design of other millimeter-wave passive devices.",

keywords = "Electron technology, FEM, Filter, Micro-electro-mechanical-systems, Shielded membrane microstrip line",

author = "Yang, \{Huai Zhi\} and Sun, \{Hou Jun\} and Yu, \{Wei Hua\} and Xin Lu",

year = "2008",

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language = "English",

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AU - Yang, Huai Zhi

AU - Sun, Hou Jun

AU - Yu, Wei Hua

AU - Lu, Xin

PY - 2008/1

Y1 - 2008/1

N2 - A novel design method was presented for millimeter-wave micro-electro-mechanical-systems (MEMS) filters based on FEM, which have the same results as the traditional FDTD method. Moreover, an MEMS filter's design and simple machining flow were studied, and some significantly academic analyzing and engineering application were obtained. The research of this design method is helpful and useful to the design of other millimeter-wave passive devices.

AB - A novel design method was presented for millimeter-wave micro-electro-mechanical-systems (MEMS) filters based on FEM, which have the same results as the traditional FDTD method. Moreover, an MEMS filter's design and simple machining flow were studied, and some significantly academic analyzing and engineering application were obtained. The research of this design method is helpful and useful to the design of other millimeter-wave passive devices.

KW - Electron technology

KW - FEM

KW - Filter

KW - Micro-electro-mechanical-systems

KW - Shielded membrane microstrip line

UR - https://www.scopus.com/pages/publications/40949103938

M3 - Article

AN - SCOPUS:40949103938

SN - 1000-1093

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EP - 42

JO - Binggong Xuebao/Acta Armamentarii

JF - Binggong Xuebao/Acta Armamentarii

IS - 1

ER -

MEMS millimeter-wave filter design based on 3-D finite element method

摘要

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