TY - JOUR
T1 - Measurement of line-width and line-width roughness based on equivalent area
AU - Li, Hong Bo
AU - Zhao, Xue Zeng
AU - Zhao, Wei Qian
PY - 2011/1
Y1 - 2011/1
N2 - A method to measure line-width and line-width roughness (LWR) is presented based on the outline feature of the step scanned by AFM. Ideally, the step cross-section along the direction of the line-width is rectangle, whose area, S, is the product of height and line-width. Actually, the outline of the step cross-section is polygonal, whose area, S1, is equaled to S. The height of the profile scanned by AFM, H, is calculated by improving Tsai's height algorithm. So, line-with, We, is calculated according to S1 and H. LWR is also calculated according to its definition as the 3σ value of line-width variation.
AB - A method to measure line-width and line-width roughness (LWR) is presented based on the outline feature of the step scanned by AFM. Ideally, the step cross-section along the direction of the line-width is rectangle, whose area, S, is the product of height and line-width. Actually, the outline of the step cross-section is polygonal, whose area, S1, is equaled to S. The height of the profile scanned by AFM, H, is calculated by improving Tsai's height algorithm. So, line-with, We, is calculated according to S1 and H. LWR is also calculated according to its definition as the 3σ value of line-width variation.
KW - Atomic force microscope
KW - Equivalent area
KW - Linewidth
KW - Linewidth roughness
KW - Metrology
UR - https://www.scopus.com/pages/publications/79952798688
U2 - 10.3969/j.issn.1000-1158.2011.01.04
DO - 10.3969/j.issn.1000-1158.2011.01.04
M3 - Article
AN - SCOPUS:79952798688
SN - 1000-1158
VL - 32
SP - 16
EP - 19
JO - Jiliang Xuebao/Acta Metrologica Sinica
JF - Jiliang Xuebao/Acta Metrologica Sinica
IS - 1
ER -