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Magnetorheological finishing of optical surface combined with symmetrical tool function

  • Beijing Institute of Technology
  • Chinese University of Hong Kong

科研成果: 期刊稿件文章同行评审

摘要

This research is aimed at the development of computer-aided polishing technology for optical surfaces using magnetorheological (MR) fluid as medium. The mechanism of a dual-axis polishing wheel and the mathematical model combined with a symmetrical tool function are demonstrated. The effects of speed, gap, time and geometric parameters of the tool have been experimentally evaluated by polishing a parabolic BK7 mirror in 120 mm diameter. The surface topography presented an obvious amelioration, and the shape accuracy decreased to 0. 067λ from 0. 519λ (λ = 632. 8 nm, RMS) after 75 min finishing.

源语言英语
页(从-至)408-412
页数5
期刊Frontiers of Optoelectronics in China
3
4
DOI
出版状态已出版 - 2010
已对外发布

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