@inproceedings{8760be5128414fc8823a496d53bbfa51,
title = "Low Crosstalk Electrothermal Micromirrors for High-speed Resonant Scanning",
abstract = "Electrothermal micromirrors face challenges of irregular scanning patterns when operated near resonance, primarily due to significant mechanical crosstalk. This paper presents an innovative decoupled electrothermal micromirror, effectively minimizing cross-axis crosstalk by approximately 30 to 50 times at the resonant frequency via an eigenmode separation method.",
keywords = "Decoupled Design, Electrothermal Micromirror, Mechanical Crosstalk, MEMS, Resonant Scanning",
author = "Teng Pan and Jiaan Jin and Hengzhang Yang and Xiaodan Mao and Qiangxian Qi and Qian Chen and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024 ; Conference date: 28-07-2024 Through 01-08-2024",
year = "2024",
doi = "10.1109/OMN61224.2024.10685243",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024",
address = "United States",
}