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Light field microscope for 3D profile measurement of micro-structured array

  • Yao Hu
  • , Haibo Gao
  • , Shizhu Yuan
  • , Rui Shi

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Micro-structured array is a crucial optical element with wide range of applications. The optical performance of micro-structured array is determined by feature sizes of array, such as diameter, depth and the uniformity across the whole array. Those sizes can be directed retrieved from the 3D profile. We propose a 3D profile measurement system based on light field microscope, which is promising in achieving fast data acquisition by one shot. We propose the principle of measurement, develop the algorithm for focus stack calculation and 3D reconstruction. Preliminary experiments suggest the prospects and challenges.

源语言英语
主期刊名MOC 2015 - Technical Digest of 20th Microoptics Conference
出版商Institute of Electrical and Electronics Engineers Inc.
ISBN(电子版)9784863485433
DOI
出版状态已出版 - 23 2月 2016
活动20th Microoptics Conference, MOC 2015 - Fukuoka, 日本
期限: 25 10月 201528 10月 2015

出版系列

姓名MOC 2015 - Technical Digest of 20th Microoptics Conference

会议

会议20th Microoptics Conference, MOC 2015
国家/地区日本
Fukuoka
时期25/10/1528/10/15

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