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Laser differential confocal lens thickness measurement

  • Beijing Institute of Technology
  • Institute of Disaster Prevention Science and Technology

科研成果: 期刊稿件文章同行评审

摘要

Based on the property that the absolute zero of an axial intensity curve exactly corresponds to the focus of the objective in a differential confocal system (DCS), a new laser differential confocal lens thickness measurement is proposed to achieve the high-precision non-contact measurement of lens thickness. The proposed approach uses the absolute zero of DCS axial response curve to precisely identify the vertexes of the test lens, obtains the central optical thickness of the test lens, and then uses the radius of curvature and refractive index of the test lens and the ray tracing facet iterative calculation to obtain the central geometrical thickness of the test lens. The theoretical analyses and preliminary experiments indicate that the measurement accuracy is better than 0.03%.

源语言英语
期刊论文编号055204
期刊Measurement Science and Technology
23
5
DOI
出版状态已出版 - 5月 2012
已对外发布

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