@inproceedings{7bf8e66d0a6f48fdad1456b2ca9df9ee,
title = "Investigation and analysis of a MOEMS gyroscope based on novel resonator",
abstract = "In this paper, a micro-optical-electro-mechanical system (MOEMS) gyroscope was developed taking a new optical microcavity - planar microdisk cavity as the core sensing element. The planar microdisk cavity was designed with high Q value and small volume, and the processing technology of the planar microdisk cavity was discussed in detail with the micro-nano machining process technology. To obtain resonance curve, a resonant cavity proof-of-principle experiment was performed. As the light source and planar microdisk cavity dimensions have a decisive influence on the Q value of microcavity and angular rate measurement limit of gyroscope, a method was discussed that using traditional F-P cavity resonance curve for optimization of planar microdisk cavity geometric parameters.",
keywords = "F-P cavity, MOEMS gyroscope, Planar microdisk cavity, Principle verified",
author = "Min Zhao and Shubin Yan and Yingzhan Yan and Pengfei Jia and Zheng Liu and Jie Li and Jun Liu",
year = "2010",
doi = "10.1109/RCSLPLT.2010.5615307",
language = "English",
isbn = "9781424455133",
series = "2010 Academic Symposium on Optoelectronics and Microelectronics Technology and 10th Chinese-Russian Symposium on Laser Physics and Laser Technology, RCSLPLT/ASOT 2010",
pages = "337--340",
booktitle = "2010 Academic Symposium on Optoelectronics and Microelectronics Technology and 10th Chinese-Russian Symposium on Laser Physics and Laser Technology, RCSLPLT/ASOT 2010",
note = "2010 Academic Symposium on Optoelectronics and Microelectronics Technology and 10th Chinese-Russian Symposium on Laser Physics and Laser Technology, RCSLPLT/ASOT 2010 ; Conference date: 28-07-2010 Through 01-08-2010",
}