Inverse polarizing effect of subwavelength metallic gratings in deep ultraviolet band

Using subwavelength structures to manipulate the polarization of deep ultraviolet light is generally known as difficult with the current nano-fabrication technologies. An aluminum grating with period close to the incident wavelength is designed and experimentally evidenced to exhibit a pronounced inverse polarizing effect in the deep ultraviolet band. By using the Fourier modal method and planar waveguide theory, we show that the main contributor to the inverse polarizing effect is the excitation of surface plasmons on the front surface of the grating.