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Inverse Hartmann surface form measurement based on spherical coordinates

  • Jian Rong Ma*
  • , Qun Hao
  • , Qiu Dong Zhu
  • , Yao Hu
  • *此作品的通讯作者
  • Beijing Institute of Technology

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Various methods for surface form measurement of aspheric and complex optics exist at present. Each method is just suitable for several limited optic surface form measurement. Hartmann measurement is a method that reconstructs the surface form of a test mirror from form slope. It gives quantitative evaluation of a test mirror in a short time. Compared with interferometry, it has advantages such as relatively simple setup, good anti-disturbance property and low cost. However, it is difficult for conventional Hartmann and Shack-Hartmann methods to increase their measurement dynamic range and resolution simultaneously, and they can not be used to measure steep aspheric surface form. A novel method named inverse Hartmann surface form measurement based on spherical coordinates is presented. The method increases the measurement dynamic range and resolution simultaneously. It reduces the measured ray slope, increases the measurement range, and its accuracy of form error is higher than that in rectangular coordinates. It can be applied in online optic product evaluation rapidly and accurately with low cost.

源语言英语
主期刊名2011 International Conference on Optical Instruments and Technology
主期刊副标题Optoelectronic Measurement Technology and Systems
出版商SPIE
ISBN(印刷版)9780819488428
DOI
出版状态已出版 - 2011
活动2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems - Beijing, 中国
期限: 6 11月 20119 11月 2011

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
8201
ISSN(印刷版)0277-786X

会议

会议2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
国家/地区中国
Beijing
时期6/11/119/11/11

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