@inproceedings{852cfa96d09e42f7bddcd2b91b7238bc,
title = "Internal Structuring of Silicon using THz-Repetition-Rate Trains of Ultrashort Pulses",
abstract = "We generate and apply trains of infrared femtosecond pulses at the highest achievable repetition-rates. This gives unique multi-timescale control parameters used for improved energy deposition and reliable 3D laser writing deep inside silicon.",
author = "A. Wang and A. Das and D. Grojo",
note = "Publisher Copyright: {\textcopyright} 2020 OSA.; 2020 Conference on Lasers and Electro-Optics, CLEO 2020 ; Conference date: 10-05-2020 Through 15-05-2020",
year = "2020",
month = may,
language = "English",
series = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings",
address = "United States",
}