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Influence of SU-8 removal process on mechanical properties of electrodeposited nickel
Jianhua Li
, Bo Fu, Xiulong Ou
外国语学院
Huaihai Industrial Corporation
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Engineering
Microelectromechanical System
100%
Good Mechanical Property
100%
Removal Process
100%
Salt Baths
100%
Young's Modulus
50%
Test Result
50%
Elastic Element
50%
Photoresist
50%
Network Polymer
50%
Strong Acid
50%
Material Science
Microelectromechanical System
100%
Thermal Stability
50%
Young's Modulus
50%
Electroplating
50%
Actuator
50%
Biocompatibility
50%
Polymer Network
50%
Organic Solvents
50%
Indentation Hardness Testing
50%
Chemical Resistance
50%