Inertial measurement sensors and systems in extreme harsh environments

To obtain the inertial sensor and measurement system in high overload, high speed, and extremely harsh environmental conditions, several typical inertial sensors and measuring system technologies are presented under transient high-range and large dynamic-range conditions. Analyses and discussion are mainly focused on the extreme environment of super and large dynamic-range tests requiring special sensing methods and micro-nano integrated manufacturing technology, to attenuate impact factors in harsh external environments combining special packaging protection and system integration method. It can implement new high overload, high inertia rotary motion vector parameters sensing and measurement.