@inproceedings{e7efae91678e4f0b9cb060a0f0dea4da,
title = "Honeycomb-like disk resonator with high immunity to fabrication error for gyroscopic application",
abstract = "This paper reports a novel honeycomb-like disk resonator for gyroscopic application. Compared with the state of the art nested-rings disk resonator, the honeycomb-like disk resonator can provide more than two-fold higher immunity to the fabrication error, which means that structure imperfection could cause less relative frequency error. The honeycomb-like disk resonator also shows much higher resonant frequency which results in superiorities in robustness to the environment disturbance and mechanical resolution.",
author = "Dingbang Xiao and Xin Zhou and Qingsong Li and Zhanqiang Hou and Yulie Wu and Wei Li and Xinghua Wang and Jinying Zhang and Xuezhong Wu",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",
year = "2017",
month = feb,
day = "23",
doi = "10.1109/MEMSYS.2017.7863612",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1126--1129",
booktitle = "2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017",
address = "United States",
}