TY - JOUR
T1 - High-sensitivity SAW micro-pressure sensor with cantilever beam structure
T2 - optimization of IDT and electrode
AU - Duan, Zhuoyue
AU - Yin, Peng
AU - Wang, Tao
AU - Yu, Xiaotao
AU - Ji, Wei
AU - Lu, Jihua
AU - Feng, Lihui
N1 - Publisher Copyright:
© The Author(s), under exclusive licence to Springer-Verlag GmbH Germany, part of Springer Nature 2026.
PY - 2026/2
Y1 - 2026/2
N2 - SAW sensors are distinguished by the compact size, passive wireless operation, and sensitivity to multiple physical parameters, which assure widely applications across various fields. We present the design of a highly sensitive SAW micro-pressure sensor featuring a multi-layer structure and an inertial cantilever beam. The working principle is theoretically analyzed, and finite element method (FEM) simulations are conducted to compare the performance of cantilever beams, simply supported beams and circular membranes. The optimal placement of interdigital transducers (IDTs) is determined, the effects of dimensional parameters and material properties are assessed with performances of broadened frequency range and improved sensitivities. The fabrication process is finalized besides the developed testing system. Experimental results confirm high sensitivity to micro pressure, with distinct resonant frequency shifts observed under varying pressure conditions.
AB - SAW sensors are distinguished by the compact size, passive wireless operation, and sensitivity to multiple physical parameters, which assure widely applications across various fields. We present the design of a highly sensitive SAW micro-pressure sensor featuring a multi-layer structure and an inertial cantilever beam. The working principle is theoretically analyzed, and finite element method (FEM) simulations are conducted to compare the performance of cantilever beams, simply supported beams and circular membranes. The optimal placement of interdigital transducers (IDTs) is determined, the effects of dimensional parameters and material properties are assessed with performances of broadened frequency range and improved sensitivities. The fabrication process is finalized besides the developed testing system. Experimental results confirm high sensitivity to micro pressure, with distinct resonant frequency shifts observed under varying pressure conditions.
UR - https://www.scopus.com/pages/publications/105029027603
U2 - 10.1007/s00542-025-06005-w
DO - 10.1007/s00542-025-06005-w
M3 - Article
AN - SCOPUS:105029027603
SN - 0946-7076
VL - 32
JO - Microsystem Technologies
JF - Microsystem Technologies
IS - 2
M1 - 20
ER -