@inproceedings{62e3d649938542bda14e928b842ebe2d,
title = "Half-millimeter-range vertically scanning microlenses for microscopic focusing applications",
abstract = "This paper presents the design, fabrication and operation of a new class of microlens scanners that can generate large vertical piston motion at low actuation voltages. These scanners are needed by endoscopic bio-imaging applications such as optical coherence microscopy (OCM) which require microlenses to axially scan their focal planes by 0.5 to 2 mm. Photoresist reflow technique was used to form microlenses on lens holders that are integrated with large-vertical-displacement (LVD) microactuators. The lens holders are fabricated using a modified post-CMOS micromachining process which can provide additional thermal isolation to the polymer microlens and form a transparent oxide mesh within the hollow lens-holders to enable formation of larger polymer microlenses. These scanners have demonstrated a maximum vertical displacement of 0.71 mm at an actuation voltage of 23 V.",
author = "Ankur Jain and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2006 TRF.; 13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 ; Conference date: 04-06-2006 Through 08-06-2006",
year = "2006",
language = "English",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "74--77",
editor = "Leland Spangler and Kenny, \{Thomas W.\}",
booktitle = "2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006",
}