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Frontier exploration of laser-assisted electrochemical deposition: from multidimensional optical-field control to multifunctional device integration

  • Jiang Zhang
  • , Haoting Ma
  • , Changyi Liu
  • , Yanan Su
  • , Yuanyuan Xiong
  • , Richen Jia
  • , Qian Cheng*
  • *此作品的通讯作者
  • Beijing Institute of Technology

科研成果: 期刊稿件文献综述同行评审

摘要

Laser-assisted electrochemical deposition (LAECD) integrates the spatiotemporal programmability of lasers with the interfacial selectivity of electrochemical processes, offering a promising route for micro/nanofabrication and functional device construction. Recent advances have demonstrated its potential in microelectrodes, interconnects, functional surfaces, and sensors. Nevertheless, current research remains largely confined to single-spot scanning and single-material systems, leading to bottlenecks in both processing throughput and system-level functionality. This review surveys frontier developments from two complementary perspectives: (i) optical-field dimensionality expansion—leveraging structured light, spatial light modulation, holography, and emerging sources to enable parallel deposition, complex 3D morphologies, and local reaction-field control; and (ii) material and functional dimensionality expansion—emphasizing in situ multi-material deposition, metal–nonmetal heterogeneous integration, and embedded device fabrication. Together, these perspectives delineate a pathway from “structure fabrication” toward “system manufacturing.” We further analyze key scientific and engineering challenges—including multi-physics coupling, material compatibility, precision–throughput trade-offs, in situ monitoring, and equipment standardization—and propose, for the first time, a roadmap toward an integrated “light–field–material–sensing–control” platform. This framework aims to transition LAECD from laboratory demonstrations into reproducible, scalable, and integrable manufacturing technologies.

源语言英语
期刊论文编号115895
期刊Optics and Laser Technology
204
DOI
出版状态已出版 - 12月 2026
已对外发布

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