Finite element analysis and optical micro-scanner based on ferroelectric ceramics

Optical micro-scanner and its amplifier structure based on ferroelectric ceramics as well as flexible hinge is presented; and the properties of single-axis and flexible hinge analyzed. Finite element method is then used to simulate the flexible hinge magnification of the optical micro-scanner. It shows that when the minimum thickness of flexible hinge is twice the radius of arc, the micro-scanner structure can perform stable displacement, while the magnification ratio is enhanced to 3.25 times the displacement given by ferroelectric ceramics. The rationality of magnifying structure is thus validated exactly.