TY - GEN
T1 - Fiber-optic confocal microscope with an electrothermally-actuated, large-tunable-range microlens scanner for depth scanning
AU - Liu, Lin
AU - Wu, Lei
AU - Zory, Peter
AU - Xie, Huikai
PY - 2010
Y1 - 2010
N2 - We present a fiber-optic reflectance confocal microscope using a large-tunable-range MEMS microlens scanner for automatic axial scan. The tunable microlens is actuated by an electrothermal actuator that is capable of scanning up to 0.9 mm at less than 6.3 V. The lateral shift and tilt of the microlens are about 10 μm and 0.4° , respectively. 2-D cross-sectional reflectance confocal images of micro-particles in polymer and rat skin have been obtained with the lateral and axial resolutions of about 1.2 μm and 38 μm, respectively.
AB - We present a fiber-optic reflectance confocal microscope using a large-tunable-range MEMS microlens scanner for automatic axial scan. The tunable microlens is actuated by an electrothermal actuator that is capable of scanning up to 0.9 mm at less than 6.3 V. The lateral shift and tilt of the microlens are about 10 μm and 0.4° , respectively. 2-D cross-sectional reflectance confocal images of micro-particles in polymer and rat skin have been obtained with the lateral and axial resolutions of about 1.2 μm and 38 μm, respectively.
UR - https://www.scopus.com/pages/publications/77952771022
U2 - 10.1109/MEMSYS.2010.5442280
DO - 10.1109/MEMSYS.2010.5442280
M3 - Conference contribution
AN - SCOPUS:77952771022
SN - 9781424457649
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 827
EP - 830
BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Y2 - 24 January 2010 through 28 January 2010
ER -