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Fiber faceplate modulation readout in Bi-material micro-cantilever mirror array imaging system

  • Mei Hui*
  • , Zhengzheng Xia
  • , Ming Liu
  • , Liquan Dong
  • , Xiaohua Liu
  • , Yuejin Zhao
  • *此作品的通讯作者
  • Beijing Institute of Technology

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Fiber faceplate modulation was applied to read out the precise actuation of silicon-based, surface micro-fabricated cantilever mirrors array in optical imaging system. The faceplate was made by ordered bundles consisting of as many as ten thousands fibers. The transmission loss of an individual fiber in the bundles was 0.35dB/cm and the cross talk between neighboring fibers in the faceplate was about 15%. Micro-cantilever mirrors array (Focal-Plane Array (FPA)) which composed of two-level bi-material pixels, absorb incident infrared flux and result in a temperature increase. The temperature distribution of incident flux transformed to the deformation distribution in FPA which has a very big difference in coefficients of thermal expansion. FPA plays the roles of target sensing and has the characteristics of high detection sensitivity. Instead of general filter such as knife edge or pinhole, fiber faceplate modulate the beam reflected by the units of FPA. An optical readout signal brings a visible spectrum into pattern recognition system, yielding a visible image on monitor. Thermal images at room temperature have been obtained. The proposed method permits optical axis compact and image noise suppression.

源语言英语
主期刊名Dimensional Optical Metrology and Inspection for Practical Applications V
编辑Kevin G. Harding, Song Zhang
出版商SPIE
ISBN(电子版)9781510601093
DOI
出版状态已出版 - 2016
活动Dimensional Optical Metrology and Inspection for Practical Applications V - Baltimore, 美国
期限: 20 4月 2016 → …

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
9868
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议Dimensional Optical Metrology and Inspection for Practical Applications V
国家/地区美国
Baltimore
时期20/04/16 → …

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