Effect of fabrication errors on superresolution property of a pupil filter

Three analytical models have been established for superresolution parameters G_Ae, G_Te, and S_e related to transmission function A(ρ), phase function of Φ(ρ), and the structural parameters with fabrication errors of an N-zone circular-symmetrical superresolution pupil filter. These new models established, directly relate the superresolution parameters of an N-zone super-resolution pupil filter to its fabrication errors to make the quantitative analyses of the effect of fabrication errors easier, thereby providing a theoretical basis for the analysis, design, and fabrication of an N-zone super-resolution pupil filter. The models established for G_Ae, G_Te, and S_e have been used to analyze the effect of the fabrication errors of a three-zone phase-only pupil filter on its superresolution property, to verify their validities.