@inproceedings{56ace98e5bd44f6d85a4f12866e0316a,
title = "Dynamic compact thermal model of an electrothermal micromirror based on transmission line theory",
abstract = "A procedure for building a parametric dynamic thermal model of electrothermally-actuated devices is developed and demonstrated using a 1-D scanning micromirror. The micromirror is actuated by thermal bimorphs and an embedded platinum (Pt) resistor is used for generating Joule heating. The thermal model is developed by drawing analogy between heat flow in the device and current-flow through an electrical transmission line. It provides the temperature of the embedded heater and the bimorph actuators. The distributed thermal impedances of the transmission-line model are represented by an equivalent circuit model with a few elements. A simplification of the circuit model is proposed when small length scales are involved. Rotation angle per unit power input predicted by the circuit model has an error of less than 8\% compared to experimental results. The low-frequency decay in device response is accurately predicted.",
keywords = "Compact thermal model, Dynamic thermal model, Lumped element, Micromirror, Transmission-line",
author = "Sagnik Pal and Huikai Xie",
year = "2010",
language = "English",
isbn = "9781439834022",
series = "Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010",
pages = "589--592",
booktitle = "Nanotechnology 2010",
note = "Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 ; Conference date: 21-06-2010 Through 24-06-2010",
}