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Digital Moiré based transient interferometry and its application in optical surface measurement

  • Qun Hao
  • , Yifeng Tan
  • , Shaopu Wang
  • , Yao Hu*
  • *此作品的通讯作者
  • Beijing Institute of Technology

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

摘要

Digital Moiré based transient interferometry (DMTI) is an effective non-contact testing methods for optical surfaces. In DMTI system, only one frame of real interferogram is experimentally captured for the transient measurement of the surface under test (SUT). When combined with partial compensation interferometry (PCI), DMTI is especially appropriate for the measurement of aspheres with large apertures, large asphericity or different surface parameters. Residual wavefront is allowed in PCI, so the same partial compensator can be applied to the detection of multiple SUTs. Excessive residual wavefront aberration results in spectrum aliasing, and the dynamic range of DMTI is limited. In order to solve this problem, a method based on wavelet transform is proposed to extract phase from the fringe pattern with spectrum aliasing. Results of simulation demonstrate the validity of this method. The dynamic range of Digital Moiré technology is effectively expanded, which makes DMTI prospective in surface figure error measurement for intelligent fabrication of aspheric surfaces.

源语言英语
主期刊名AOPC 2017
主期刊副标题3D Measurement Technology for Intelligent Manufacturing
编辑Anand Krishna Asundi, Huijie Zhao, Wolfgang Osten
出版商SPIE
ISBN(电子版)9781510613973
DOI
出版状态已出版 - 2017
活动Applied Optics and Photonics China: 3D Measurement Technology for Intelligent Manufacturing, AOPC 2017 - Beijing, 中国
期限: 4 6月 2017 → 6 6月 2017

丛书

姓名Proceedings of SPIE - The International Society for Optical Engineering
卷10458
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议Applied Optics and Photonics China: 3D Measurement Technology for Intelligent Manufacturing, AOPC 2017
国家/地区中国
市Beijing
时期4/06/17 → 6/06/17

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