Design of a digital laser integrated inspection system and ghost-image evaluation

A digital laser integrated inspection system has been developed to address the requirement for on-site multi parameter characterization of high-energy laser sources. By means of a front-end beam-splitting architecture, the system enables simultaneous measuremen to flas erenergy and beam quality, while an off-axis dual-reflector optical configuration is employed to evaluate beam pointing stability. At the receiving end, high-precision linear guiderails are incorporated to synchronously determine the beam quality factor (M² factor), thereby eliminating systematic errors induced by repeated alignment and adjustment procedures. To mitigate interference arising from ghost images generated by transmissive optical components, such as beam splitters and filters, comprehensive models of both primary and secondary ghost-image propagation paths are established. The LightTools software is utilized to quantitatively compute the energy contribution of single-path ghost images, with their relative impact assessed through normalization criteria. Ghost-image formation is effectively suppressed by introducing an angular tilt to the ghost-image generation plane. Simulation results demonstrate that tilting the rear surface of the beam splitter by an appropriate angle completely removes ghost images from the effective field of view. The optimized optical design significantly reduces ghost-image energy and enhances the system signal-to-noise ratio, thereby improving theoverall detection accuracy of the integrated inspectionsystem.