Design of 3DOF parallel mechanism with thin plate for micro finger module in micro manipulation

A dexterous micro manipulation system was developed for applications such as assembling micro machines, manipulating cells, and micro surgery. We have proposed a concept of a two-fingered micro hand, and designed and built a prototype. We succeeded in performing basic micro manipulations, including the grasp, release, and rotation of a microscopic object. The two-fingered micro hand prototype should be more miniaturized for higher accuracy and combination in small chamber of SEM. In this paper, we will propose a new 3DOF parallel mechanism for the micro manipulator in order to achieve low cost and small size. The thin plate, which is punched some holes and bent, is only used to the new mechanism. This process is only performed with press machine. So, low cost, small size and mass produce are easily achieved. Also the two-fingered micro hand with the mechanism was designed and make as a prototype. Basic experiment shows excellent micro capability.